Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910235 | Substrate treating apparatus and substrate treating method | Kazuki Nakamura, Katsunori Tanaka | 2021-02-02 |
| 8127391 | Subtrate treatment apparatus | Junichi Ishii | 2012-03-06 |
| 5881876 | Method and vessel for storing a substrate cleaning brush | Akihiko Morita, Naoko Onodera, Fumitake Mieno | 1999-03-16 |
| 5601645 | Substrate holder for a substrate spin treating apparatus | Masaru Kitagawa | 1997-02-11 |