Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6692165 | Substrate processing apparatus | Akiko Tanaka, Masakazu Sanada, Osamu Tamada, Masahiko Harumoto | 2004-02-17 |
| 6440218 | Coating solution applying method and apparatus | Masakazu Sanada, Shigehiro Goto, Minobu Matsunaga | 2002-08-27 |