Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5568252 | Method and apparatus for measuring insulation film thickness of semiconductor wafer | Tatsufumi Kusuda, Ikuyoshi Nakatani, Sadao Hirae | 1996-10-22 |
| 5554939 | Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same | Sadao Hirae, Hideaki Matsubara, Takamasa Sakai | 1996-09-10 |
| 5475319 | Method of measuring electric charge of semiconductor wafer | Sadao Hirae, Hideaki Matsubara | 1995-12-12 |
| 5444389 | Method and apparatus for measuring lifetime of minority carriers in semiconductor | Sadao Hirae, Takamasa Sakai | 1995-08-22 |
| 5239183 | Optical gap measuring device using frustrated internal reflection | Ikuyoshi Nakatani, Takamasa Sakai, Sadao Hirae | 1993-08-24 |
| 5233291 | Method of and apparatus for measuring electric characteristics of semiconductor wafer | Ikuyoshi Nakatani, Takamasa Sakai | 1993-08-03 |
| 5225690 | Gap measuring device and method using frustrated internal reflection | Takamasa Sakai, Sadao Hirae, Ikuyoshi Nakatani | 1993-07-06 |