Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9041907 | Drawing device and drawing method | Yoshio Furuya, Ryosuke Ito, Kenji Nakanishi, Kazutaka Taniguchi, Ryo Yamada | 2015-05-26 |
| 8499713 | Water-based coating application system | Masazumi Watanabe | 2013-08-06 |
| 7869062 | Apparatus for supporting substrate, apparatus for measuring surface potential, apparatus for measuring film thickness, and apparatus for inspecting substrate | Takamasa Sakai | 2011-01-11 |
| 7795886 | Surface voltmeter | Motohiro Kono, Toshikazu Kitajima, Kazuhiko Fuse | 2010-09-14 |
| 7598746 | Surface voltmeter and surface voltage measurement method | Motohiro Kono, Kazuhiko Fuse | 2009-10-06 |
| 7427520 | Method and apparatus for measuring thickness of thin film formed on substrate | Motohiro Kono, Toshikazu Kitajima | 2008-09-23 |
| 6938649 | Substrate holding device, substrate processing apparatus, and method of releasing substrate | — | 2005-09-06 |