Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9875919 | Heat treatment method for heating substrate by irradiating substrate with flash of light | — | 2018-01-23 |
| 9607870 | Heat treatment apparatus and heat treatment method for heating substrate by irradiating substrate with flash of light | — | 2017-03-28 |
| 9437448 | Substrate treatment method and substrate treating apparatus | — | 2016-09-06 |
| 8963050 | Apparatus for and method of heat-treating thin film on surface of substrate | Shinichi Kato | 2015-02-24 |
| 8861944 | Heat treatment apparatus and method for heating substrate by light irradiation | Kenichi Yokouchi | 2014-10-14 |
| 8852966 | Heat treatment method and heat treatment apparatus of thin film | Kazuhiko Fuse, Shinichi Kato | 2014-10-07 |
| 8498525 | Heat treatment apparatus and method for heating substrate by light irradiation | Kenichi Yokouchi | 2013-07-30 |
| 8145046 | Heat treatment apparatus and method for heating substrate by light irradiation | Kenichi Yokouchi | 2012-03-27 |
| 8041198 | Heat treatment apparatus and method for heating substrate by photo-irradiation | Kenichi Yokouchi | 2011-10-18 |