Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502273 | Heat treatment apparatus and heat treatment method for measuring particle concentration | — | 2016-11-22 |
| 9330949 | Heat treatment apparatus for heating substrate by irradiating substrate with flash of light | Kenichi Yokouchi | 2016-05-03 |
| 8559799 | Heat treatment apparatus and method for heating substrate by photo-irradiation | Shinichi Kato | 2013-10-15 |
| 6518547 | Heat treatment apparatus | Mitsukazu Takahashi, Yoshio Ito | 2003-02-11 |