Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5611685 | Substrate heat treatment apparatus | Toshihiro Nakajima, Takatoshi Chiba, Toru Sato | 1997-03-18 |
| 5405446 | Apparatus for heat processing a substrate | Toshihiro Nakajima, Takatoshi Chiba, Toru Sato | 1995-04-11 |
| 5315092 | Apparatus for heat-treating wafer by light-irradiation and device for measuring temperature of substrate used in such apparatus | Mitsukazu Takahashi, Takatoshi Chiba | 1994-05-24 |