Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417906 | Substrate processing method and substrate processing apparatus | Yuta Nakano | 2025-09-16 |
| 12042813 | Substrate processing method and substrate processing apparatus | Hiroshi Abe, Takashi Ota, Kenji Kobayashi, Ryo MURAMOTO, Sei NEGORO +2 more | 2024-07-23 |
| 11524314 | Substrate processing method and substrate processing device | Manabu OKUTANI, Hiroshi Abe | 2022-12-13 |