Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10695792 | Substrate processing method and substrate processing apparatus | Takashi Ota, Hiroshi Abe, Naohiko YOSHIHARA | 2020-06-30 |
| 10527348 | Substrate processing method and substrate processing apparatus | Naohiko YOSHIHARA, Takashi Ota, Hiroshi Abe | 2020-01-07 |
| 10475670 | Substrate processing apparatus and substrate processing method | Naohiko YOSHIHARA, Kenji Kobayashi | 2019-11-12 |
| 10249487 | Substrate processing method | Kenji Kobayashi, Naohiko YOSHIHARA | 2019-04-02 |
| 9852914 | Sacrificial-film removal method and substrate processing device | Tomonori Umezaki, Akiou Kikuchi | 2017-12-26 |
| 9786522 | Substrate treatment method and substrate treatment apparatus | Kenji Kobayashi | 2017-10-10 |
| 9768011 | Substrate treatment method and substrate treatment apparatus | — | 2017-09-19 |
| 9728443 | Substrate processing apparatus and substrate processing method | Naohiko YOSHIHARA, Kenji Kobayashi | 2017-08-08 |
| 9698031 | Substrate treatment method and substrate treatment apparatus | Kenji Kobayashi | 2017-07-04 |
| 9455134 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Tetsuya EMOTO, Masayuki OTSUJI | 2016-09-27 |
| 9259758 | Substrate treatment method and substrate treatment apparatus | Tetsuya EMOTO | 2016-02-16 |
| 9005703 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Tetsuya EMOTO, Masayuki OTSUJI | 2015-04-14 |
| 8821974 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Tetsuya EMOTO, Masayuki OTSUJI | 2014-09-02 |