Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211695 | Etching method and etching apparatus | Nobuhiro Takahashi | 2025-01-28 |
| 11127597 | Etching method | Reiko SASAHARA, Satoshi TODA, Takuya Abe, Tsuhung Huang, Yoshie OZAWA +2 more | 2021-09-21 |