Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7416793 | Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same | Hiroto Matsuda, Kazuhiro Nobori, Tetsuya Kawajiri | 2008-08-26 |
| 7353979 | Method of fabricating substrate placing stage | Tomoyuki Fujii, Tetsuya Kawajiri | 2008-04-08 |