Issued Patents All Time
Showing 26–50 of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10586720 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2020-03-10 |
| 10508340 | Atmospheric lid with rigid plate for carousel processing chambers | Kevin Griffin | 2019-12-17 |
| 10494736 | Device to increase deposition uniformity in spatial ALD processing chamber | Alexander S. Polyak | 2019-12-03 |
| 10415137 | Non-metallic thermal CVD/ALD Gas Injector and Purge Systems | Alexander S. Polyak | 2019-09-17 |
| 10351956 | Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD | Kaushal Gangakhedkar | 2019-07-16 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Mei Chang, Faruk Gungor, Paul F. Ma, David Chu, Chien-Teh Kao +2 more | 2019-06-18 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2019-06-04 |
| 10273578 | Top lamp module for carousel deposition chamber | Robert T. Trujillo, Kevin Griffin, Garry K. Kwong, Kallol Bera, Li-Qun Xia +1 more | 2019-04-30 |
| 10262888 | Apparatus and methods for wafer rotation in carousel susceptor | Kaushal Gangakhedkar | 2019-04-16 |
| 10256125 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2019-04-09 |
| 10197385 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Garry K. Kwong, Kevin Griffin | 2019-02-05 |
| 10196741 | Wafer placement and gap control optimization through in situ feedback | Kevin Griffin, Abraham Ravid, Alex Minkovich, Somesh Khandelwal, Todd Egan | 2019-02-05 |
| 10192770 | Spring-loaded pins for susceptor assembly and processing methods using same | — | 2019-01-29 |
| 10186449 | Apparatus and methods for wafer rotation to improve spatial ALD process uniformity | William T. Weaver, Jeffrey Blahnik | 2019-01-22 |
| 9922860 | Apparatus and methods for wafer chucking on a susceptor for ALD | Kaushal Gangakhedkar | 2018-03-20 |
| 9892941 | Multi-zone resistive heater | Anqing Cui, Binh Tran, Alexander Tam, Jacob Smith, R. Suryanarayanan Iyer +1 more | 2018-02-13 |
| 9856561 | Auto-refill ampoule and methods of use | Kenric Choi | 2018-01-02 |
| 9837250 | Hot wall reactor with cooled vacuum containment | Joel M. Huston, Olkan Cuvalci, Michael P. Karazim | 2017-12-05 |
| 9765434 | Apparatus for susceptor temperature verification and methods of use | Kevin Griffin | 2017-09-19 |
| 9721757 | Elongated capacitively coupled plasma source for high temperature low pressure environments | John C. Forster, Garry K. Kwong, Tai T. Ngo, Kevin Griffin, Kenneth S. Collins +1 more | 2017-08-01 |
| 9663859 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Garry K. Kwong, Kevin Griffin | 2017-05-30 |
| 9631277 | Atomic layer deposition carousel with continuous rotation and methods of use | — | 2017-04-25 |
| 9617640 | Apparatus and methods for injector to substrate gap control | Kevin Griffin, Kaushal Gangakhedkar | 2017-04-11 |
| 9429247 | Acoustically-monitored semiconductor substrate processing systems and methods | Kommisetti Subrahmanyam, Todd Egan, Michael W. Johnson | 2016-08-30 |
| 9378994 | Multi-position batch load lock apparatus and systems and methods including same | William T. Weaver, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2016-06-28 |