Issued Patents All Time
Showing 51–75 of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355819 | Elongated capacitively coupled plasma source for high temperature low pressure environments | John C. Forster, Garry K. Kwong, Tai T. Ngo, Kevin Griffin, Kenneth S. Collins +1 more | 2016-05-31 |
| 9305805 | Methods for atomic layer etching | Mei Chang | 2016-04-05 |
| 9261193 | Sealing apparatus for a process chamber | — | 2016-02-16 |
| 9175394 | Atomic layer deposition chamber with multi inject | Anh N. Nguyen, Tai T. Ngo | 2015-11-03 |
| 9111876 | Methods for atomic layer etching | Mei Chang | 2015-08-18 |
| 9109754 | Apparatus and method for providing uniform flow of gas | Mei Chang, Faruk Gungor, Paul F. Ma, David Chu, Chien-Teh Kao +2 more | 2015-08-18 |
| 8955547 | Apparatus and method for providing uniform flow of gas | Faruk Gungor, Dien-Yeh Wu, Mei Chang | 2015-02-17 |
| 8633115 | Methods for atomic layer etching | Mei Chang | 2014-01-21 |
| 8342119 | Self aligning non contact shadow ring process kit | Lawrence Chung-Lai Lei, Salvador P. Umotoy, Tom Madar, Girish Dixit, Gwo-Chuan Tzu | 2013-01-01 |
| 8168269 | Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool | Mahreeyee Mahajani, Brendon McDougall | 2012-05-01 |
| 8099817 | Wafer edge cleaning | Anne-Douce Coulin, Leon Volfovski | 2012-01-24 |
| 7962990 | Brush box cleaner module with force control | Hui Chen, Allen L. D'Ambra | 2011-06-21 |
| 7923280 | Millisecond annealing (DSA) edge protection | Blake Koelmel, Robert C. McIntosh, David D L Larmagnac, Alexander Lerner, Abhilash J. Mayur | 2011-04-12 |
| 7921803 | Chamber components with increased pyrometry visibility | Brendan McDougall, Ravi Jallepally, Yi-Chiau Huang, Maitreyee Mahajani, Kevin Griffin +1 more | 2011-04-12 |
| 7900311 | Wafer edge cleaning | Anne-Douce Coulin, Leon Volfovski | 2011-03-08 |
| 7833351 | Batch processing platform for ALD and CVD | Aaron P. Webb, Adam Brailove, Nir Merry, Andrew J. Constant, Efrain Quiles +3 more | 2010-11-16 |
| 7798096 | Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool | Maitreyee Mahajani, Brendan McDougall | 2010-09-21 |
| 7779527 | Methods and apparatus for installing a scrubber brush on a mandrel | Tai T. Ngo, Leon Volfovski, Anne-Douce Coulin | 2010-08-24 |
| 7774887 | Scrubber box and methods for using the same | Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl, Steve Ghanayem +4 more | 2010-08-17 |
| 7754518 | Millisecond annealing (DSA) edge protection | Blake Koelmel, Robert C. McIntosh, David D L Larmagnac, Alexander Lerner, Abhilash J. Mayur | 2010-07-13 |
| 7748542 | Batch deposition tool and compressed boat | Robert C. Cook, Nir Merry | 2010-07-06 |
| 7429717 | Multizone heater for furnace | — | 2008-09-30 |
| 7381926 | Removable heater | Robert C. Cook | 2008-06-03 |
| 7377002 | Scrubber box | Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl, Steve Ghanayem +4 more | 2008-05-27 |
| 7222636 | Electronically actuated valve | Anh N. Nguyen, Mark A. Alexander, Hungsuk A. Yoon, Chiliang Chen | 2007-05-29 |