Issued Patents All Time
Showing 76–100 of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6994319 | Membrane gas valve for pulsing a gas | — | 2006-02-07 |
| 6868859 | Rotary gas valve for pulsing a gas | — | 2005-03-22 |
| 6821563 | Gas distribution system for cyclical layer deposition | — | 2004-11-23 |
| 6818094 | Reciprocating gas valve for pulsing a gas | — | 2004-11-16 |
| 6767176 | Lift pin actuating mechanism for semiconductor processing chamber | Salvador P. Umotoy | 2004-07-27 |
| 6730175 | Ceramic substrate support | Salvador P. Umotoy, Shamouil Shamouilian, Ron Rose, Rita Dukes, Xiaoxiong Yuan | 2004-05-04 |
| 6589352 | Self aligning non contact shadow ring process kit | Lawrence Chung-Lai Lei, Salvador P. Umotoy, Tom Madar, Girish Dixit, Gwo-Chuan Tzu | 2003-07-08 |
| 6555164 | Shadow ring and guide for supporting the shadow ring in a chamber | — | 2003-04-29 |
| 6544340 | Heater with detachable ceramic top plate | — | 2003-04-08 |
| 6521292 | Substrate support including purge ring having inner edge aligned to wafer edge | Salvador P. Umotoy, Thomas Madar | 2003-02-18 |
| 6503331 | Tungsten chamber with stationary heater | Lawrence Chung-Lai Lei, Salvador P. Umotoy | 2003-01-07 |
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Calvin Augason, Leonel A. Zuniga, Jun Zhao, Talex Sajoto +5 more | 2002-10-15 |
| 6436192 | Apparatus for aligning a wafer | Ling Chen, Ying Yu, Lawrence Chung-Lai Lei | 2002-08-20 |
| 6375748 | Method and apparatus for preventing edge deposition | Tom Madar, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Anzhong Chang +1 more | 2002-04-23 |
| 6374508 | Apparatus and method for aligning a substrate on a support member | Kenneth Tsai, Ilya Perlov, Eugene Gantvarg | 2002-04-23 |
| 6350320 | Heater for processing chamber | Semyon Sherstinsky, Alison Gilliam, Paul Smith, Leonel A. Zuniga, Ted G. Yoshidome +4 more | 2002-02-26 |
| 6328808 | Apparatus and method for aligning and controlling edge deposition on a substrate | Kenneth Tsai, Steve Ghanayem, Ken Kaung Lai, Patricia M. Liu, Toshiyuki Nakagawa +1 more | 2001-12-11 |
| 6271148 | Method for improved remote microwave plasma source for use with substrate processing system | Chien-Teh Kao, Kenneth Tsai, Quyen Pham, Ronald L. Rose, Calvin Augason | 2001-08-07 |
| 6248176 | Apparatus and method for delivering a gas | Kenneth Tsai, Steve Ghanayem, Semyon Sherstinsky | 2001-06-19 |
| 6223447 | Fastening device for a purge ring | Salvador P. Umotoy, Lawrence Chung-Lai Lei, Ronald L. Rose | 2001-05-01 |
| 6210483 | Anti-notch thinning heater | Ken Tsai, Steve Ghanayem, Ken Kaung Lai | 2001-04-03 |
| 6186092 | Apparatus and method for aligning and controlling edge deposition on a substrate | Kenneth Tsai, Steve Ghanayem, Ken Kaung Lai, Patricia M. Liu, Toshiyuki Nakagawa +1 more | 2001-02-13 |
| 6168668 | Shadow ring and guide for supporting the shadow ring in a chamber | — | 2001-01-02 |
| 6146463 | Apparatus and method for aligning a substrate on a support member | Kenneth Tsai, Ilya Perlov, Eugene Gantvarg | 2000-11-14 |
| 6063440 | Method for aligning a wafer | Ling Chen, Ying Yu, Lawrence Chung-Lai Lei | 2000-05-16 |