Issued Patents All Time
Showing 101–103 of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6040011 | Substrate support member with a purge gas channel and pumping system | Moris Kori | 2000-03-21 |
| 6026762 | Apparatus for improved remote microwave plasma source for use with substrate processing systems | Chien-Teh Kao, Kenneth Tsai, Quyen Pham, Ronald L. Rose, Calvin Augason | 2000-02-22 |
| 5985033 | Apparatus and method for delivering a gas | Kenneth Tsai, Steve Ghanayem, Semyon Sherstinsky | 1999-11-16 |