Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8168269 | Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool | Mahreeyee Mahajani, Joseph Yudovsky | 2012-05-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8168269 | Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool | Mahreeyee Mahajani, Joseph Yudovsky | 2012-05-01 |