Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7921803 | Chamber components with increased pyrometry visibility | Joseph Yudovsky, Ravi Jallepally, Yi-Chiau Huang, Maitreyee Mahajani, Kevin Griffin +1 more | 2011-04-12 |
| 7897208 | Low temperature ALD SiO2 | Maitreyee Mahajani, Yi-Chiau Huang | 2011-03-01 |
| 7798096 | Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool | Maitreyee Mahajani, Joseph Yudovsky | 2010-09-21 |
| 7781016 | Method for measuring precursor amounts in bubbler sources | Ronald Stevens, Jacob Smith, Garry K. Kwong, Sandeep Nijhawan, Lori D. Washington | 2010-08-24 |
| 7749574 | Low temperature ALD SiO2 | Maitreyee Mahajani, Yi-Chiau Huang | 2010-07-06 |