Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416647 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Mark Denome | 2002-07-09 |
| 6406359 | Apparatus for transferring semiconductor substrates using an input module | Manoocher Birang, Brian J. Brown, Anwar Husain | 2002-06-18 |
| 6291777 | Conductive feed-through for creating a surface electrode connection within a dielectric body and method of fabricating same | Vincent E. Burkhart | 2001-09-18 |
| 6290865 | Spin-rinse-drying process for electroplated semiconductor wafers | Mark Cassidy Cridlin Lloyd, Ashok Sinha, Sergio Edelstein | 2001-09-18 |
| 6258220 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2001-07-10 |
| 6219219 | Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system | Gilbert Hausmann, Anantha K. Subramani, Peter Satitpunwaycha, Raymond Gristi, Bradley O. Stimson +2 more | 2001-04-17 |
| 6081414 | Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system | Allen Flanigan | 2000-06-27 |
| 5656093 | Wafer spacing mask for a substrate support chuck and method of fabricating same | Vincent E. Burkhart, Howard Grunes | 1997-08-12 |
| 5567909 | Method for supporting a wafer in a combined wafer support and temperature monitoring device | Michael Beesely, Shannon J. Kelsey, Robert Steger | 1996-10-22 |
| 5356486 | Combined wafer support and temperature monitoring device | Michael Beesely, Shannon J. Kelsey, Robert Steger | 1994-10-18 |
| 5129994 | Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport | Peter Ebbing, Kien N. Chuc, Jack Ford, Fred H. Hariz | 1992-07-14 |