Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5894887 | Ceramic dome temperature control using heat pipe structure and method | Philip M. Salzman | 1999-04-20 |
| 5567909 | Method for supporting a wafer in a combined wafer support and temperature monitoring device | Michael Sugarman, Michael Beesely, Robert Steger | 1996-10-22 |
| 5356486 | Combined wafer support and temperature monitoring device | Michael Sugarman, Michael Beesely, Robert Steger | 1994-10-18 |