Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5567909 | Method for supporting a wafer in a combined wafer support and temperature monitoring device | Michael Sugarman, Shannon J. Kelsey, Robert Steger | 1996-10-22 |
| 5356486 | Combined wafer support and temperature monitoring device | Michael Sugarman, Shannon J. Kelsey, Robert Steger | 1994-10-18 |