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Method and system for classification of photo-plethysmographically detected respiratory effort |
Clark R. Baker, Jr., Michael P. O'Neil, Shannon E. Campbell |
2020-01-14 |
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Method and system for classification of photo-plethysmographically detected respiratory effort |
Clark R. Baker, Jr., Michael P. O'Neil, Shannon E. Campbell |
2015-06-02 |
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Method and system for classification of photo-plethysmographically detected respiratory effort |
Clark R. Baker, Jr., Michael P. O'Neil, Shannon E. Campbell |
2013-02-05 |
| 8219170 |
System and method for practicing spectrophotometry using light emitting nanostructure devices |
Michael P. O'Neil, Paul D. Mannheimer |
2012-07-10 |
| 7984714 |
Managing obstructive sleep apnea and/or snoring using local time released agents |
Shannon E. Campbell |
2011-07-26 |
| 6908865 |
Method and apparatus for cleaning substrates |
Martin Kranz, Srinivas Guggilla, Suraj Rengarajan, Mei Chang, Gongda Yao +1 more |
2005-06-21 |
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Chemical vapor deposition of barriers from novel precursors |
Vijay D. Parkhe, Jagadish Kalyanam |
2004-06-01 |
| 6547934 |
Reduction of metal oxide in a dual frequency etch chamber |
Barney M. Cohen, Vijay D. Parkhe, Zheng Xu |
2003-04-15 |
| 6475902 |
Chemical vapor deposition of niobium barriers for copper metallization |
Vijay D. Parkhe, Jagadish Kalyanam |
2002-11-05 |
| 6219219 |
Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system |
Anantha K. Subramani, Peter Satitpunwaycha, Raymond Gristi, Bradley O. Stimson, Chia-Au Bill Lu +2 more |
2001-04-17 |
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Apparatus and method for actively controlling surface potential of an electrostatic chuck |
— |
2001-04-10 |
| 6163448 |
Apparatus and method for ex-situ testing of performance parameters on an electrostatic chuck |
— |
2000-12-19 |
| 6117246 |
Conductive polymer pad for supporting a workpiece upon a workpiece support surface of an electrostatic chuck |
Vijay D. Parkhe |
2000-09-12 |
| 6104596 |
Apparatus for retaining a subtrate in a semiconductor wafer processing system and a method of fabricating same |
— |
2000-08-15 |
| 6099697 |
Method of and apparatus for restoring a support surface in a semiconductor wafer processing system |
— |
2000-08-08 |
| 6067222 |
Substrate support apparatus and method for fabricating same |
— |
2000-05-23 |
| 6057244 |
Method for improved sputter etch processing |
Vijay D. Parkhe, Chia-Ao William LU, Michael S. Jackson |
2000-05-02 |
| 5886866 |
Electrostatic chuck having a combination electrode structure for substrate chucking, heating and biasing |
— |
1999-03-23 |
| 5880923 |
Method and apparatus for improved retention of a semiconductor wafer within a semiconductor wafer processing system |
— |
1999-03-09 |
