Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10532170 | Method and system for classification of photo-plethysmographically detected respiratory effort | Clark R. Baker, Jr., Michael P. O'Neil, Shannon E. Campbell | 2020-01-14 |
| 9044558 | Method and system for classification of photo-plethysmographically detected respiratory effort | Clark R. Baker, Jr., Michael P. O'Neil, Shannon E. Campbell | 2015-06-02 |
| 8365730 | Method and system for classification of photo-plethysmographically detected respiratory effort | Clark R. Baker, Jr., Michael P. O'Neil, Shannon E. Campbell | 2013-02-05 |
| 8219170 | System and method for practicing spectrophotometry using light emitting nanostructure devices | Michael P. O'Neil, Paul D. Mannheimer | 2012-07-10 |
| 7984714 | Managing obstructive sleep apnea and/or snoring using local time released agents | Shannon E. Campbell | 2011-07-26 |
| 6908865 | Method and apparatus for cleaning substrates | Martin Kranz, Srinivas Guggilla, Suraj Rengarajan, Mei Chang, Gongda Yao +1 more | 2005-06-21 |
| 6743473 | Chemical vapor deposition of barriers from novel precursors | Vijay D. Parkhe, Jagadish Kalyanam | 2004-06-01 |
| 6547934 | Reduction of metal oxide in a dual frequency etch chamber | Barney M. Cohen, Vijay D. Parkhe, Zheng Xu | 2003-04-15 |
| 6475902 | Chemical vapor deposition of niobium barriers for copper metallization | Vijay D. Parkhe, Jagadish Kalyanam | 2002-11-05 |
| 6219219 | Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system | Anantha K. Subramani, Peter Satitpunwaycha, Raymond Gristi, Bradley O. Stimson, Chia-Au Bill Lu +2 more | 2001-04-17 |
| 6215640 | Apparatus and method for actively controlling surface potential of an electrostatic chuck | — | 2001-04-10 |
| 6163448 | Apparatus and method for ex-situ testing of performance parameters on an electrostatic chuck | — | 2000-12-19 |
| 6117246 | Conductive polymer pad for supporting a workpiece upon a workpiece support surface of an electrostatic chuck | Vijay D. Parkhe | 2000-09-12 |
| 6104596 | Apparatus for retaining a subtrate in a semiconductor wafer processing system and a method of fabricating same | — | 2000-08-15 |
| 6099697 | Method of and apparatus for restoring a support surface in a semiconductor wafer processing system | — | 2000-08-08 |
| 6067222 | Substrate support apparatus and method for fabricating same | — | 2000-05-23 |
| 6057244 | Method for improved sputter etch processing | Vijay D. Parkhe, Chia-Ao William LU, Michael S. Jackson | 2000-05-02 |
| 5886866 | Electrostatic chuck having a combination electrode structure for substrate chucking, heating and biasing | — | 1999-03-23 |
| 5880923 | Method and apparatus for improved retention of a semiconductor wafer within a semiconductor wafer processing system | — | 1999-03-09 |