Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6219219 | Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system | Gilbert Hausmann, Anantha K. Subramani, Peter Satitpunwaycha, Bradley O. Stimson, Chia-Au Bill Lu +2 more | 2001-04-17 |
| 5975590 | High pressure fitting | Norman Cowan, Shannon Hart | 1999-11-02 |
| 5900062 | Lift pin for dechucking substrates | Peter Loewenhardt, Hiroji Hanawa, Gerald Yin, Yan Ye | 1999-05-04 |