Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9175392 | System for multi-region processing | Kent Riley Child | 2015-11-03 |
| 8709270 | Masking method and apparatus | — | 2014-04-29 |
| 7879151 | Mask etch processing apparatus | Khiem K. Nguyen, Alfred Mak | 2011-02-01 |
| 7785172 | Combinatorial processing including rotation and movement within a region | Richard Endo, Zachary Fresco, Nitin Kumar | 2010-08-31 |
| 7682984 | Interferometer endpoint monitoring device | Khiem K. Nguyen, Alfred Mak | 2010-03-23 |
| 7128806 | Mask etch processing apparatus | Khiem K. Nguyen, Alfred Mak | 2006-10-31 |
| 6238533 | Integrated PVD system for aluminum hole filling using ionized metal adhesion layer | Gongda Yao, Kenny King-Tai Ngan, Zheng Xu | 2001-05-29 |
| 6219219 | Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system | Gilbert Hausmann, Anantha K. Subramani, Raymond Gristi, Bradley O. Stimson, Chia-Au Bill Lu +2 more | 2001-04-17 |
| 6159055 | RF electrode contact assembly for a detachable electrostatic chuck | Joseph Stevens | 2000-12-12 |
| 6139679 | Coil and coil feedthrough | — | 2000-10-31 |
| 6045666 | Aluminum hole filling method using ionized metal adhesion layer | Gongda Yao, Kenny King-Tai Ngan, Zheng Xu | 2000-04-04 |