| 9175392 |
System for multi-region processing |
Kent Riley Child |
2015-11-03 |
| 8709270 |
Masking method and apparatus |
— |
2014-04-29 |
| 7879151 |
Mask etch processing apparatus |
Khiem K. Nguyen, Alfred Mak |
2011-02-01 |
| 7785172 |
Combinatorial processing including rotation and movement within a region |
Richard Endo, Zachary Fresco, Nitin Kumar |
2010-08-31 |
| 7682984 |
Interferometer endpoint monitoring device |
Khiem K. Nguyen, Alfred Mak |
2010-03-23 |
| 7128806 |
Mask etch processing apparatus |
Khiem K. Nguyen, Alfred Mak |
2006-10-31 |
| 6238533 |
Integrated PVD system for aluminum hole filling using ionized metal adhesion layer |
Gongda Yao, Kenny King-Tai Ngan, Zheng Xu |
2001-05-29 |
| 6219219 |
Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system |
Gilbert Hausmann, Anantha K. Subramani, Raymond Gristi, Bradley O. Stimson, Chia-Au Bill Lu +2 more |
2001-04-17 |
| 6159055 |
RF electrode contact assembly for a detachable electrostatic chuck |
Joseph Stevens |
2000-12-12 |
| 6139679 |
Coil and coil feedthrough |
— |
2000-10-31 |
| 6045666 |
Aluminum hole filling method using ionized metal adhesion layer |
Gongda Yao, Kenny King-Tai Ngan, Zheng Xu |
2000-04-04 |
