Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7050160 | Process and apparatus for integrating sheet resistance measurements and reflectance measurements of a thin film in a common apparatus | Walter H. Johnson, Shankar Krishnan, Murali Narasimhan | 2006-05-23 |
| 6743473 | Chemical vapor deposition of barriers from novel precursors | Vijay D. Parkhe, Gilbert Hausmann | 2004-06-01 |
| 6491978 | Deposition of CVD layers for copper metallization using novel metal organic chemical vapor deposition (MOCVD) precursors | — | 2002-12-10 |
| 6475902 | Chemical vapor deposition of niobium barriers for copper metallization | Gilbert Hausmann, Vijay D. Parkhe | 2002-11-05 |