Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043372 | High-density low temperature carbon films for hardmask and other patterning applications | Samuel E. Gottheim, Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa +2 more | 2021-06-22 |
| 11043375 | Plasma deposition of carbon hardmask | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Gonzalo Monroy +2 more | 2021-06-22 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Keiichi Tanaka, Mandyam Sriram, Bhaskar Jyoti Bhuyan, Pramit Manna +2 more | 2021-06-08 |
| 10954129 | Diamond-like carbon as mandrel | Takehito Koshizawa, Pramit Manna, Chi-Pin Lu, Chi-I Lang, Nancy Fung +1 more | 2021-03-23 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2021-02-02 |
| 10840088 | Low temperature high-quality dielectric films | Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick | 2020-11-17 |
| 10745282 | Diamond-like carbon film | Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick | 2020-08-18 |
| 10504727 | Thick tungsten hardmask films deposition on high compressive/tensile bow wafers | Jiarui Wang, Prashant Kumar Kulshreshtha, Susmit Singha Roy, Kwangduk Douglas Lee | 2019-12-10 |
| 10475642 | Doped and undoped vanadium oxides for low-k spacer applications | Srinivas Gandikota, Kelvin Chan, Atashi Basu, Abhijit Basu Mallick | 2019-11-12 |
| 10403502 | Boron doped tungsten carbide for hardmask applications | Abhijit Basu Mallick, Susmit Singha Roy, Takehito Koshizawa | 2019-09-03 |
| 10312137 | Hardmask layer for 3D NAND staircase structure in semiconductor applications | Susmit Singha Roy, Pramit Manna, Abhijit Basu Mallick | 2019-06-04 |