Method of forming a diamond film

Assignee

• Applied Materials

Inventors

• Vicknesh Sahmuganathan (8 patents)
• Jiteng Gu (4 patents)
• Zhongxin Chen (4 patents)
• Kian Ping Loh (13 patents)
• John Sudijono (68 patents)
• Haisen Xu (1 patents)
• Sze Chieh Tan (3 patents)
• Yuanxing Han (1 patents)
• Jiecong Tang (2 patents)
• Eswaranand Venkatasubramanian (38 patents)
• Abhijit Basu Mallick (217 patents)

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