| 8932995 |
Combinatorial process system |
Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng |
2015-01-13 |
$704,000 |
| 8770143 |
Multi-region processing system |
Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao |
2014-07-08 |
$438,000 |
| 8771483 |
Combinatorial process system |
Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng |
2014-07-08 |
$438,000 |
| 8758581 |
Combinatorial process system |
Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng |
2014-06-24 |
$794,000 |
| 8500908 |
Method and system for mask handling in high productivity chamber |
James Tsung, Kurt H. Weiner |
2013-08-06 |
$903,000 |
| 8486821 |
Method and apparatus for variable conductance |
Jay DeDontney, James Tsung |
2013-07-16 |
$753,000 |
| 8449678 |
Combinatorial process system |
Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng |
2013-05-28 |
$1,878,000 |
| 8387563 |
Combinatorial process system |
Jeremy Cheng, Indranil De, James Tsung, Kurt H. Weiner, Maosheng Zhao |
2013-03-05 |
$1,413,000 |
| 8317925 |
Method and system for mask handling in high productivity chamber |
Kurt H. Weiner, James Tsung |
2012-11-27 |
$514,000 |
| 8216376 |
Method and apparatus for variable conductance |
Jay DeDontney, James Tsung |
2012-07-10 |
$1,445,000 |
| 8039052 |
Multi-region processing system and heads |
Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao |
2011-10-18 |
|
| 7993461 |
Method and system for mask handling in high productivity chamber |
Kurt H. Weiner, James Tsung |
2011-08-09 |
|
| 7836901 |
Method and apparatus for wafer cleaning |
Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko |
2010-11-23 |
$4,531,000 |
| 7819985 |
Method and apparatus for wafer cleaning |
Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko |
2010-10-26 |
$13,462,000 |
| 7451774 |
Method and apparatus for wafer cleaning |
Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko |
2008-11-18 |
$14,778,000 |
| 7334588 |
Method and apparatus for wafer cleaning |
Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko |
2008-02-26 |
$21,345,000 |
| 7290976 |
Semiconductor substrate processing apparatus with a passive substrate gripper |
Ralph Wadensweiler, Alexander Sou-Kang Ko |
2007-11-06 |
$26,570,000 |
| 7205023 |
Method and apparatus for chemical mixing in a single wafer process |
Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko |
2007-04-17 |
$10,588,000 |
