Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8932995 | Combinatorial process system | Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng | 2015-01-13 |
| 8770143 | Multi-region processing system | Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao | 2014-07-08 |
| 8771483 | Combinatorial process system | Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng | 2014-07-08 |
| 8758581 | Combinatorial process system | Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng | 2014-06-24 |
| 8500908 | Method and system for mask handling in high productivity chamber | James Tsung, Kurt H. Weiner | 2013-08-06 |
| 8486821 | Method and apparatus for variable conductance | Jay DeDontney, James Tsung | 2013-07-16 |
| 8449678 | Combinatorial process system | Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng | 2013-05-28 |
| 8387563 | Combinatorial process system | Jeremy Cheng, Indranil De, James Tsung, Kurt H. Weiner, Maosheng Zhao | 2013-03-05 |
| 8317925 | Method and system for mask handling in high productivity chamber | Kurt H. Weiner, James Tsung | 2012-11-27 |
| 8216376 | Method and apparatus for variable conductance | Jay DeDontney, James Tsung | 2012-07-10 |
| 8039052 | Multi-region processing system and heads | Kurt H. Weiner, Indranil De, James Tsung, Maosheng Zhao | 2011-10-18 |
| 7993461 | Method and system for mask handling in high productivity chamber | Kurt H. Weiner, James Tsung | 2011-08-09 |
| 7836901 | Method and apparatus for wafer cleaning | Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko | 2010-11-23 |
| 7819985 | Method and apparatus for wafer cleaning | Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko | 2010-10-26 |
| 7451774 | Method and apparatus for wafer cleaning | Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko | 2008-11-18 |
| 7334588 | Method and apparatus for wafer cleaning | Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko | 2008-02-26 |
| 7290976 | Semiconductor substrate processing apparatus with a passive substrate gripper | Ralph Wadensweiler, Alexander Sou-Kang Ko | 2007-11-06 |
| 7205023 | Method and apparatus for chemical mixing in a single wafer process | Steven Verhaverbeke, J. Kelly Truman, Alexander Sou-Kang Ko | 2007-04-17 |