Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8925481 | Systems and methods for measuring, monitoring and controlling ozone concentration | ShouQian Shao, Jason Wright | 2015-01-06 |
| 8851010 | Systems and methods for measuring, monitoring and controlling ozone concentration | ShouQian Shao, Jason Wright | 2014-10-07 |
| 8746284 | Apparatus and method for multiple symmetrical divisional gas distribution | — | 2014-06-10 |
| 8733280 | Showerhead for processing chamber | Lipyeow Yap, ShouQian Shao, Jason Wright | 2014-05-27 |
| 8486821 | Method and apparatus for variable conductance | Rick Endo, James Tsung | 2013-07-16 |
| 8402845 | Dual path gas distribution device | — | 2013-03-26 |
| 8293013 | Dual path gas distribution device | — | 2012-10-23 |
| 8277888 | Dual path gas distribution device | — | 2012-10-02 |
| 8216376 | Method and apparatus for variable conductance | Rick Endo, James Tsung | 2012-07-10 |
| 6921437 | Gas distribution system | Jack Yao | 2005-07-26 |
| 6890386 | Modular injector and exhaust assembly | Richard H. Matthiesen, Samuel Kurita | 2005-05-10 |
| 6859617 | Porous thin film heater and method | Arthur J. Goodsel | 2005-02-22 |
| 6352592 | Free floating shield and semiconductor processing system | Lawrence D. Bartholomew, Christopher A. Peabody | 2002-03-05 |
| 6056824 | Free floating shield and semiconductor processing system | Lawrence D. Bartholomew, Christopher A. Peabody | 2000-05-02 |
| 5935647 | Method of manufacturing an injector for chemical vapor deposition processing | Nicholas Gralenski, Adam Q. Miller | 1999-08-10 |
| 5849088 | Free floating shield | Lawrence D. Bartholomew | 1998-12-15 |
| 5683516 | Single body injector and method for delivering gases to a surface | Nicholas Gralenski, Adam Q. Miller | 1997-11-04 |
| 5136975 | Injector and method for delivering gaseous chemicals to a surface | Lawrence D. Bartholomew, Kenneth Provancha, George D. Kamian, Gregory Max MCDANIEL | 1992-08-11 |