| 8925481 |
Systems and methods for measuring, monitoring and controlling ozone concentration |
ShouQian Shao, Jason Wright |
2015-01-06 |
| 8851010 |
Systems and methods for measuring, monitoring and controlling ozone concentration |
ShouQian Shao, Jason Wright |
2014-10-07 |
| 8746284 |
Apparatus and method for multiple symmetrical divisional gas distribution |
— |
2014-06-10 |
| 8733280 |
Showerhead for processing chamber |
Lipyeow Yap, ShouQian Shao, Jason Wright |
2014-05-27 |
| 8486821 |
Method and apparatus for variable conductance |
Rick Endo, James Tsung |
2013-07-16 |
| 8402845 |
Dual path gas distribution device |
— |
2013-03-26 |
| 8293013 |
Dual path gas distribution device |
— |
2012-10-23 |
| 8277888 |
Dual path gas distribution device |
— |
2012-10-02 |
| 8216376 |
Method and apparatus for variable conductance |
Rick Endo, James Tsung |
2012-07-10 |
| 6921437 |
Gas distribution system |
Jack Yao |
2005-07-26 |
| 6890386 |
Modular injector and exhaust assembly |
Richard H. Matthiesen, Samuel Kurita |
2005-05-10 |
| 6859617 |
Porous thin film heater and method |
Arthur J. Goodsel |
2005-02-22 |
| 6352592 |
Free floating shield and semiconductor processing system |
Lawrence D. Bartholomew, Christopher A. Peabody |
2002-03-05 |
| 6056824 |
Free floating shield and semiconductor processing system |
Lawrence D. Bartholomew, Christopher A. Peabody |
2000-05-02 |
| 5935647 |
Method of manufacturing an injector for chemical vapor deposition processing |
Nicholas Gralenski, Adam Q. Miller |
1999-08-10 |
| 5849088 |
Free floating shield |
Lawrence D. Bartholomew |
1998-12-15 |
| 5683516 |
Single body injector and method for delivering gases to a surface |
Nicholas Gralenski, Adam Q. Miller |
1997-11-04 |
| 5136975 |
Injector and method for delivering gaseous chemicals to a surface |
Lawrence D. Bartholomew, Kenneth Provancha, George D. Kamian, Gregory Max MCDANIEL |
1992-08-11 |