Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10030307 | Apparatus and process for producing thin layers | Christian Schmid, Dirk Habermann, Jürgen Haungs, Chuck Attema, Tom Stewart | 2018-07-24 |
| 6242722 | Temperature controlled thin film circular heater | Bernard Feldman | 2001-06-05 |
| 5136975 | Injector and method for delivering gaseous chemicals to a surface | Lawrence D. Bartholomew, George D. Kamian, Jay DeDontney, Gregory Max MCDANIEL | 1992-08-11 |