Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133210 | Dual temperature heater | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Ganesh Balasubramanian, Jianhua Zhou +1 more | 2021-09-28 |
| 10325799 | Dual temperature heater | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Ganesh Balasubramanian, Jianhua Zhou +1 more | 2019-06-18 |
| 8733280 | Showerhead for processing chamber | Jay DeDontney, ShouQian Shao, Jason Wright | 2014-05-27 |
| 8274017 | Multifunctional heater/chiller pedestal for wide range wafer temperature control | Tuan Nguyen, Dale R. Du Bois, Sanjeev Baluja, Thomas Nowak, Juan Carlos Rocha-Alvarez +1 more | 2012-09-25 |