Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12312687 | Powder coating device | Yunyu Wang, Tong Wang, Yanfeng Liu | 2025-05-27 |
| 8932995 | Combinatorial process system | Rick Endo, Kurt H. Weiner, Indranil De, James Tsung, Jeremy Cheng | 2015-01-13 |
| 8771483 | Combinatorial process system | Rick Endo, Kurt H. Weiner, Indranil De, James Tsung, Jeremy Cheng | 2014-07-08 |
| 8770143 | Multi-region processing system | Rick Endo, Kurt H. Weiner, Indranil De, James Tsung | 2014-07-08 |
| 8758581 | Combinatorial process system | Rick Endo, Kurt H. Weiner, Indranil De, James Tsung, Jeremy Cheng | 2014-06-24 |
| 8449678 | Combinatorial process system | Rick Endo, Kurt H. Weiner, Indranil De, James Tsung, Jeremy Cheng | 2013-05-28 |
| 8387563 | Combinatorial process system | Rick Endo, Jeremy Cheng, Indranil De, James Tsung, Kurt H. Weiner | 2013-03-05 |
| 8039052 | Multi-region processing system and heads | Rick Endo, Kurt H. Weiner, Indranil De, James Tsung | 2011-10-18 |
| 7654224 | Method and apparatus for cleaning a CVD chamber | Juan Carlos Rocha-Alvarez, Inna Shmurun, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2010-02-02 |
| 7500445 | Method and apparatus for cleaning a CVD chamber | Juan Carlos Rocha-Alvarez, Inna Shmurun, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2009-03-10 |
| 7464717 | Method for cleaning a CVD chamber | Juan Carlos Rocha-Alvarez, Inna Shmurun, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2008-12-16 |
| 7465357 | Computer-readable medium that contains software for executing a method for cleaning a CVD chamber | Juan Carlos Rocha-Alvarez, Inna Shmurun, Soova Sen, Mao D. Lim, Shankar Venkataraman +1 more | 2008-12-16 |
| 6946033 | Heated gas distribution plate for a processing chamber | Lun Tsuei, Soovo Sen, Ju-Hyung Lee, Juan Carlos Rocha-Alvarez, Inna Shmurun +2 more | 2005-09-20 |
| 6932092 | Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy | Juan Carlos Rocha-Alvarez, Shankar Venkataraman | 2005-08-23 |
| 6923189 | Cleaning of CVD chambers using remote source with cxfyoz based chemistry | Annamalai Lakshmanan, Ju-Hyung Lee, Troy Kim, Shankar Venkataraman | 2005-08-02 |
| 6914014 | Method for curing low dielectric constant film using direct current bias | Lihua Li, Tzu-Fang Huang, Li-Qun Xia, Juan Carlos Rocha-Alvarez | 2005-07-05 |
| 6797643 | Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power | Juan Carlos Rocha-Alvarez, Ying Yu, Shankar Venkataraman, Srinivas D. Nemani, Li-Qun Xia | 2004-09-28 |