Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7654224 | Method and apparatus for cleaning a CVD chamber | Maosheng Zhao, Juan Carlos Rocha-Alvarez, Inna Shmurun, Soova Sen, Shankar Venkataraman +1 more | 2010-02-02 |
| 7500445 | Method and apparatus for cleaning a CVD chamber | Maosheng Zhao, Juan Carlos Rocha-Alvarez, Inna Shmurun, Soova Sen, Shankar Venkataraman +1 more | 2009-03-10 |
| 7464717 | Method for cleaning a CVD chamber | Maosheng Zhao, Juan Carlos Rocha-Alvarez, Inna Shmurun, Soova Sen, Shankar Venkataraman +1 more | 2008-12-16 |
| 7465357 | Computer-readable medium that contains software for executing a method for cleaning a CVD chamber | Maosheng Zhao, Juan Carlos Rocha-Alvarez, Inna Shmurun, Soova Sen, Shankar Venkataraman +1 more | 2008-12-16 |