Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620296 | Target sidewall design to reduce particle generation during magnetron sputtering | James Gogh, Jim Thompson, Marc Schweitzer, Yoichiro Tanaka, Alan Liu +2 more | 2003-09-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620296 | Target sidewall design to reduce particle generation during magnetron sputtering | James Gogh, Jim Thompson, Marc Schweitzer, Yoichiro Tanaka, Alan Liu +2 more | 2003-09-16 |