Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer carrier for smaller wafers and wafer pieces

Wafer carrier for smaller wafers and wafer pieces

US Patent 10236201 · Granted Mar 19, 2019

Estimated economic value: $17,059,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Drill2024
Plasma abatement of compounds containing heavy atoms2021
Apparatus for exhaust cooling2021
Non-disappearing anode for use with dielectric deposition2021
Sputtering target with backside cooling grooves2021
Smart chamber and smart chamber components2021
Physical vapor deposition in-chamber electro-magnet2020
High pressure RF-DC sputtering and methods to improve film uniformity and step-c2020
Method and apparatus for gas abatement2020
Sputtering target with backside cooling grooves2020
Arcing detection apparatus for plasma processing2020
Quick access ATV mounted bow carrier2019