Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7189639 | Use of germanium dioxide and/or alloys of GeO2 with silicon dioxide for semiconductor dielectric applications | Padmanabhan Krishnaraj, Bruno Geoffrion, Srinivas D. Nemani | 2007-03-13 |
| 7097886 | Deposition process for high aspect ratio trenches | Farhad Moghadam, Padmanabhan Krishnaraj, Thanh Pham, Zhenjiang Cui | 2006-08-29 |
| 6992024 | Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques | Zhenjiang Cui, Rick J. Roberts, Jun Zhao | 2006-01-31 |
| 6894474 | Non-intrusive plasma probe | Canfeng Lai, Qiwei Liang | 2005-05-17 |
| 6890597 | HDP-CVD uniformity control | Padmanabhan Krishnaraj, Bruno Geoffrion, Lin Zhang, Bikram Kapoor, Anchuan Wang +1 more | 2005-05-10 |
| 6878644 | Multistep cure technique for spin-on-glass films | Zhenjiang Cui, Rick J. Roberts, Jun Zhao, Khaled A. Elsheref, Alexandros T. Demos | 2005-04-12 |
| 6869880 | In situ application of etch back for improved deposition into high-aspect-ratio features | Padmanabhan Krishnaraj, Pavel Ionov, Canfeng Lai, Shamouil Shamouilian | 2005-03-22 |
| 6863019 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Shamouil Shamouilian, Canfeng Lai, Padmanabhan Krishnaraj, Tsutomu Tanaka, Sebastien Raoux +2 more | 2005-03-08 |
| 6841006 | Atmospheric substrate processing apparatus for depositing multiple layers on a substrate | Michael Barnes, Canfeng Lai, John Parks | 2005-01-11 |
| 6755150 | Multi-core transformer plasma source | Canfeng Lai, Peter Loewenhardt, Tsutomu Tanaka, Shamouil Shamouilian | 2004-06-29 |
| 6712020 | Toroidal plasma source for plasma processing | Canfeng Lai, Robert B. Majewski, David Wanamaker, Christopher T. Lane, Peter Loewenhardt +2 more | 2004-03-30 |
| 6693050 | Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques | Zhenjiang Cui, Rick J. Roberts, Jun Zhao | 2004-02-17 |
| 6450117 | Directing a flow of gas in a substrate processing chamber | Laxman Murugesh, Padmanaban Krishnaraj, Canfeng Lai, Narendra Dubey, Tom K. Cho +2 more | 2002-09-17 |
| 6418874 | Toroidal plasma source for plasma processing | Canfeng Lai, Robert B. Majewski, David Wanamaker, Christopher T. Lane, Peter Loewenhardt +2 more | 2002-07-16 |
| 6364958 | Plasma assisted semiconductor substrate processing chamber having a plurality of ground path bridges | Canfeng Lai, Michael Barnes, Lily Pang | 2002-04-02 |
| 6073745 | Adjustable yoke assembly | — | 2000-06-13 |
| 5996766 | Adjustable yoke assembly | — | 1999-12-07 |
| 5839564 | Adjustable yoke assembly | — | 1998-11-24 |