Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6814814 | Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates | Alan W. Collins, Feng Gao, Tetsuya Ishikawa, Yaxin Wang | 2004-11-09 |
| 6450117 | Directing a flow of gas in a substrate processing chamber | Laxman Murugesh, Michael S. Cox, Canfeng Lai, Narendra Dubey, Tom K. Cho +2 more | 2002-09-17 |