Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas cooled substrate support for stabilized high temperature deposition

Gas cooled substrate support for stabilized high temperature deposition

US Patent 9790589 · Granted Oct 17, 2017

Estimated economic value: $65,021,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Object synchronization apparatus and method2025
Eddy current monitoring to detect vibration in polishing2025
Multiple disk pad conditioner2025
Retaining ring having inner surfaces with features2024
Methods of detecting non-conforming substrate processing events during chemical 2024
Retaining ring having inner surfaces with facets2024
Automated temperature controlled substrate support2024
Drill2024
Chemical mechanical polishing system with platen temperature control2024
Polishing system with platen for substrate edge control2024
Sequential application of cleaning fluids for improved maintenance of chemical m2023
Method of forming retaining ring with shaped surface2023