Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068180 | Advanced temperature monitoring system and methods for semiconductor manufacture productivity | Xuesong Lu, Lin Zhang, Jang Seok OH, Balaji Pasupathy, Michael W. Johnson | 2024-08-20 |
| 12013291 | Advanced temperature monitoring system with expandable modular layout design | Shuran Sheng, Lin Zhang | 2024-06-18 |
| 11866821 | Substrate support cover for high-temperature corrosive environment | Shuran Sheng, Lin Zhang, Jiyong Huang, Stanley Wu, Mahesh Adinath Kanawade +3 more | 2024-01-09 |
| 11846011 | Lid stack for high frequency processing | Shuran Sheng, Lin Zhang | 2023-12-19 |
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jiyong Huang, Jang Seok OH, Nitin Khurana +4 more | 2023-12-05 |
| 11499231 | Lid stack for high frequency processing | Shuran Sheng, Lin Zhang | 2022-11-15 |
| 11215934 | In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing | Ralph P. ANTONIO, Shuran Sheng, Lin Zhang | 2022-01-04 |
| 11094647 | Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems | Shuran Sheng, Lin Zhang | 2021-08-17 |
| 8197636 | Systems for plasma enhanced chemical vapor deposition and bevel edge etching | Ashish Shah, Dale R. DuBois, Ganesh Balasubramanian, Mark Fodor, Eui Kyoon Kim +7 more | 2012-06-12 |