Systems for plasma enhanced chemical vapor deposition and bevel edge etching

Assignee

• Applied Materials

Inventors

• Ashish Shah (41 patents)
• Dale R. DuBois (25 patents)
• Ganesh Balasubramanian (114 patents)
• Mark Fodor (26 patents)
• Eui Kyoon Kim (4 patents)
• Chiu Chan (15 patents)
• Karthik Janakiraman (72 patents)
• Thomas Nowak (56 patents)
• Joseph C. Werner (9 patents)
• Visweswaren Sivaramakrishnan (77 patents)
• Mohamad A. Ayoub (32 patents)
• Amir Al-Bayati (51 patents)
• Jianhua Zhou (110 patents)

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