Substrate support cover for high-temperature corrosive environment

Assignee

• Applied Materials

Inventors

• Shuran Sheng (22 patents)
• Lin Zhang (205 patents)
• Jiyong Huang (4 patents)
• Joseph C. Werner (9 patents)
• Stanley Wu (12 patents)
• Mahesh Adinath Kanawade (1 patents)
• Yikai Chen (17 patents)
• Yixing Lin (16 patents)
• Ying Ma (13 patents)

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