Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026157 | Gas mixing method realized by back diffusion in a PECVD system with showerhead | Yong Kee Chae, Shuran Sheng, Liwei Li | 2011-09-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026157 | Gas mixing method realized by back diffusion in a PECVD system with showerhead | Yong Kee Chae, Shuran Sheng, Liwei Li | 2011-09-27 |