Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10961621 | CVD reactor chamber with resistive heating and substrate holder | Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Quoc Truong | 2021-03-30 |
| 5976258 | High temperature substrate transfer module | — | 1999-11-02 |