Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6159333 | Substrate processing system configurable for deposition or cleaning | Anand Gupta, Gana A. Rimple, Laxman Murugesh | 2000-12-12 |
| 5997685 | Corrosion-resistant apparatus | Charles K. Radhamohan, Laxman Murugesh | 1999-12-07 |
| 5810937 | Using ceramic wafer to protect susceptor during cleaning of a processing chamber | Anand Gupta, Gana A. Rimple, Laxman Murugesh | 1998-09-22 |