Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375744 | Sequential in-situ heating and deposition of halogen-doped silicon oxide | Laxman Murugesh, Pravin Narawankar, Jianmin Qiao, Turgut Sahin | 2002-04-23 |
| 6228781 | Sequential in-situ heating and deposition of halogen-doped silicon oxide | Laxman Murugesh, Pravin Narawankar, Jianmin Qiao, Turgut Sahin | 2001-05-08 |
| 6217658 | Sequencing of the recipe steps for the optimal low-dielectric constant HDP-CVD Processing | Laxman Murugesh, Pravin K. Narwankar | 2001-04-17 |
| 6136685 | High deposition rate recipe for low dielectric constant films | Pravin K. Narwankar, Laxman Murugesh, Turgut Sahin, Jianmin Qiao | 2000-10-24 |
| 6070550 | Apparatus for the stabilization of halogen-doped films through the use of multiple sealing layers | Kramadhati V. Ravi | 2000-06-06 |
| 5937323 | Sequencing of the recipe steps for the optimal low-k HDP-CVD processing | Laxman Murugesh, Pravin K. Narwankar | 1999-08-10 |
| 5661093 | Method for the stabilization of halogen-doped films through the use of multiple sealing layers | Kramadhati V. Ravi | 1997-08-26 |