| 6375744 |
Sequential in-situ heating and deposition of halogen-doped silicon oxide |
Laxman Murugesh, Pravin Narawankar, Jianmin Qiao, Turgut Sahin |
2002-04-23 |
| 6228781 |
Sequential in-situ heating and deposition of halogen-doped silicon oxide |
Laxman Murugesh, Pravin Narawankar, Jianmin Qiao, Turgut Sahin |
2001-05-08 |
| 6217658 |
Sequencing of the recipe steps for the optimal low-dielectric constant HDP-CVD Processing |
Laxman Murugesh, Pravin K. Narwankar |
2001-04-17 |
| 6136685 |
High deposition rate recipe for low dielectric constant films |
Pravin K. Narwankar, Laxman Murugesh, Turgut Sahin, Jianmin Qiao |
2000-10-24 |
| 6070550 |
Apparatus for the stabilization of halogen-doped films through the use of multiple sealing layers |
Kramadhati V. Ravi |
2000-06-06 |
| 5937323 |
Sequencing of the recipe steps for the optimal low-k HDP-CVD processing |
Laxman Murugesh, Pravin K. Narwankar |
1999-08-10 |
| 5661093 |
Method for the stabilization of halogen-doped films through the use of multiple sealing layers |
Kramadhati V. Ravi |
1997-08-26 |
