Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Anodes for fluorine gas discharge lasers

Anodes for fluorine gas discharge lasers

US Patent 7230965 · Granted Jun 12, 2007

Estimated economic value: $5,214,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Control system for a plurality of deep ultraviolet optical oscillators2025
Conduit system, radiation source, lithographic apparatus, and methods thereof2025
Reducing fretting corrosion in a gas discharge chamber support device2024
Gas management system2024
Gas management system2024
Method of and apparatus for extending electrode life in a laser chamber2023
Nonwoven screens for dust trapping in laser discharge chambers2023
Long-life-light system for deterring rats, mice and similar pets2020
Sheet for use in ground works2020
Erosion resistant electrodes for use in generating gas discharge laser2018
High pulse repetition rate gas discharge laser2017
High pulse repetition rate gas discharge laser2017