Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Conduit system, radiation source, lithographic apparatus, and methods thereof

Conduit system, radiation source, lithographic apparatus, and methods thereof

US Patent 12341314 · Granted Jun 24, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electromagnetic shield for a sealing mechanism of a laser chamber2025
Reducing fretting corrosion in a gas discharge chamber support device2024
Gas management system2024
Gas management system2024
Fluorine detection in a gas discharge light source2023
Therapeutic field directional magnetic array2022
Apparatus for tuning discharge performance in a laser chamber2022
Spectral filtering for Raman spectroscopy2021
High pulse repetition rate gas discharge laser2017
Apparatus, system, and method for laser-induced breakdown spectroscopy2014
6 KHz and above gas discharge laser system2014
Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser2014