6 KHz and above gas discharge laser system

Assignee

• Cymer

Inventors

• Richard C. Ujazdowski (45 patents)
• Richard M. Ness (47 patents)
• J. Martin Algots (9 patents)
• Vladimir B. Fleurov (14 patents)
• Frederick Palenschat (5 patents)
• Walter Dale Gillespie (18 patents)
• Bryan Moosman (13 patents)
• Thomas D. Steiger (18 patents)
• Brett D. Smith (12 patents)
• Thomas E. McKelvey (2 patents)

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