Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7193228 | EUV light source optical elements | Norbert Bowering, Alexander I. Ershov, Timothy Dyer | 2007-03-20 |
| 4575402 | Method for fabricating conductors in integrated circuits | Paul J. Marcoux, Eileen M. Murray | 1986-03-11 |