Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6409580 | Rigid polishing pad conditioner for chemical mechanical polishing tool | Wayne Lougher | 2002-06-25 |
| 6288357 | Ion milling planarization of semiconductor workpieces | — | 2001-09-11 |
| 6209483 | Apparatus and method for removing silicon dioxide residues from CVD reactors | — | 2001-04-03 |
| 6203417 | Chemical mechanical polishing tool components with improved corrosion resistance | John F. Stumpf | 2001-03-20 |
| 6108189 | Electrostatic chuck having improved gas conduits | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2000-08-22 |
| 5904776 | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Arik Donde, Dan Maydan, Robert Steger, Edwin C. Weldon, Brian Lue | 1999-05-18 |
| 5800623 | Semiconductor wafer support platform | — | 1998-09-01 |
| 5744400 | Apparatus and method for dry milling of non-planar features on a semiconductor surface | — | 1998-04-28 |
| 5720818 | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Arik Donde, Dan Maydan, Robert Steger, Edwin C. Weldon, Brian Lue | 1998-02-24 |