Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7897947 | Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance wave | — | 2011-03-01 |
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Alexander N. Bykanov, Norbert Bowering, David C. Brandt, Alexander I. Ershov, Rodney D. Simmons +2 more | 2011-01-18 |